Interferometers (White Light) Product Technology
 

・Reliable inline thickness measurement        of thin layers to 1um

・Absolute distance measurement with          nanometer accuracy

・Thickness measurement with                      submicrometer accuracy

・High-precision thickness measurement      of monocrystalline silicon wafers

・Absolute distance measurement with          subnanometer accuracy
 
 

 

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Semiconductor Industry–interferoMETER 5400-DS

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