Confocal high temperature sensors for environments up to 200° C

The new confocal chromatic high-temperature sensors set standards for measurements in demanding environments. For the first time, the Micro-Epsilon portfolio includes optical sensors that can withstand temperatures up to 200 °C - with maximum measurement accuracy. Thanks to their compact design, these sensors are ideal for applications with very limited installation space. The innovative HT models are available in various measuring ranges and with a 90° beam path, and can be flexibly adapted to different installation situations. Due to minimal outgassing, the sensors are suitable for use up to ultra-high vacuum (UHV) - perfect for measurement tasks in precision machine building and the semiconductor industry.

confocalDT IFS2407-0,8HT/VAC

Measuring range (mm): 0.8
Linearity: max. < ±0,18 µm
Resolution: max. < 6 nm
Low outgassing: Ideal for UHV and clean room applications
Use in extreme environmental conditions: Reliable measurement at temperatures up to 200 °C
Stainless steel housing 1.4404

confocalDT IFS2407-2HT/VAC

Measuring range (mm): 2
Linearity: max. < ±0,44 µm
Resolution: max. < 10 nm
Low outgassing: Ideal for UHV and clean room applications
Use in extreme environmental conditions: Reliable measurement at temperatures up to 200 °C
Stainless steel housing 1.4404
Models with 90° beam path

confocalDT IFS2407-4HT/VAC

Measuring range (mm): 4
Linearity: max. < ±0,8 µm
Resolution: max. < 24 nm
Low outgassing: Ideal for UHV and clean room applications
Use in extreme environmental conditions: Reliable measurement at temperatures up to 200 °C
Stainless steel housing 1.4404
Models with 90° beam path